Quantitative Ion Beam Analysis for Light Elements using In-air and High Depth Resolution Systems

Ion beam is used for quantitative element analysis. In the Wakasa Wan Energy Research Center (WERC), various types of ion beam analysis; Particle Induced X-ray Emission (PIXE), Rutherford Backscattering Spectrometry (RBS), and Elastic Recoil Detection Analysis (ERDA), have been performed with a 5 MV tandem accelerator. Recently, in-air and time-of-flight systems have been developed in WERC. The in-air measurement is required often for hydrogen storage materials to determine hydrogen quantity. Hydrogen quantities of magnesium-hydride (MgHx) thin films after production and after hydrogen absorption by magnetron sputtering were measured by the in-air system. The time-of-flight (TOF) ERDA measurement is useful for multi element simultaneous analysis with high depth resolution. The TiO2 thin film of 10 nm thickness has been measured with the TOF ERDA system.