Towards model-driven reconstruction in atom probe tomography
JOURNAL OF PHYSICS D-APPLIED PHYSICS（2020）
Abstract
Reconstructions in atom probe tomography (APT) are plagued by image distortions arising from changes in the specimen geometry throughout the experiment. The simplistic and inaccurate geometrical assumptions that underpin the conventional reconstruction approach account for much of this distortion. Here we extend our previous work of modelling APT experiments using level set methods to three dimensions (3D). This model is used to generate and subsequently reconstruct synthetic APT datasets from electron tomography (ET) of anAl-Mg-SiMore
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Key words
field evaporation,boundary element method,panel clustering,atom probe tomography,level set method,data reconstruction,distortion correction
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