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Suppression of grain boundary steps in chemical mechanical polishing of W-Ni-Fe alloy by a citric acid-based slurry

Jiang Guo,Chuanping Song,Lin Niu,Xiaolin Shi,Zhuji Jin, Changsheng Guo,Yoshiharu Namba

Manufacturing Letters（2020）

Cited 7|Views6
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Abstract
•A citric acid-based slurry was introduced to suppress grain boundary steps.•The roles of chemical actions in boundary step generation was elucidated.•Best surface roughness was obtained with proper balance between mechanical and chemical actions.
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Key words
Chemical mechanical polishing,W-Ni-Fe alloy,Grain boundary step,Roughness
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