Tribological performance of Nb-C thin films prepared by DC and HiPIMS

Materials Letters(2020)

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摘要
•Nb-C coatings have been prepared by DC and HiPIMS.•A coating densification by changing from DC to HiPIMS was not observed.•Higher amount and clustering of a-C:H is formed in HiPIMS vs.DC at comparative C at.%•Good tribological properties are obtained for samples with high C content (>50 at.%)
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关键词
Physical vapour deposition,Sputtering,Nanocomposites,Thin films,Wear and tribology
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