Numerical Study of the Thresholds of Sputtering of Metals during Bombardment with Low-Energy Ions
Bulletin of The Russian Academy of Sciences: Physics(2020)
摘要
The transfer of energy from bombarding
$${{{\text{K}}}^{ + }}$$
and
$${\text{A}}{{{\text{r}}}^{ + }}$$
ions (
= 10–100 eV) to vanadium atoms is studied via molecular dynamics using the Vs potential. The threshold energy of vanadium sputtering is determined, and a numerical way of determining the thresholds of sputtering for solids is proposed.
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关键词
bombardment,sputtering,ions,thresholds,metals,low-energy
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