3D trenched-electrode pixel sensors: Design, technology and initial results

G.T. Forcolin,M. Boscardin,F. Ficorella,A. Lai,A. Loi,R. Mendicino,S. Ronchin,G.-F. Dalla Betta

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment（2020）

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摘要

3D sensors have already been proven as a viable and inherently radiation hard technology. While encouraging timing results have been obtained from small-pitch 3D test structure, new approaches are also being investigated to meet the challenges of the coming years.

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关键词

3D silicon,Particle tracking detectors,Radiation-hard detectors

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