Sensitivity Of Lekid For Space Applications Between 80 Ghz And 600 Ghz

We report the design, fabrication, and testing of lumped element kinetic inductance detectors (LEKID) showing performance in line with the requirements of the next generation space telescopes operating in the spectral range from 80 GHz to 600 GHz. This range is of particular interest for cosmic microwave background studies. For this purpose we designed and fabricated 100 pixel arrays covering five distinct bands. These wafers were measured via multiplexing, in which a full array is read out using a single pair of lines. We adopted a custom cold black body installed in front of the detectors and regulated at temperatures between 1 K and 20 K. In this paper, we describe in the main design considerations, fabrication processes, testing and data analysis.