Understanding Vibrant Behavior Of Si-Circular Diaphragm For Low-Pressure Measurement

Enhanced sensitivity, precise measurements and accuracy are the key factors to identify the performance of any sensor. In this paper, p-polycrystalline silicon micro-pressure sensor has been designed which works on the principle of piezoresistive effect. A theoretical modeling and computational simulation of the circular Si-diaphragm have been performed through the extensive study of stress and frequency response with the help of finite element method (FEM) within the framework of COMSOL. For a thin diaphragm (similar to 50 mu m), the Eigen frequency and the frequency generated in a diaphragm under the influence of pressure has been optimized within the pressure range from 1-25 kPa. The modes of vibrations generated in the diaphragm have been optimized at wide-frequency range similar to 200-800 kHz at various pressure values. The findings of the presented research have suggested that for a similar to 50 mu m pin thin diaphragm, the optimized fundamental frequency is 310 kHz for showing better piezoresistive response which results into enhanced sensitivity. Moreover, the simulation results show that for the designed sensor, the pressure sensitivity of similar to 11.51 mv/psi has been conveyed.