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Structure Design for the XY table of Microelectronics

Li Zhang,Xiangbo Ouyang, Bo Yin

THIRTEENTH NATIONAL CONFERENCE ON PACKAGING ENGINEERING, TNCPE 13（2010）

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Abstract
XY table of wire bonding has been designed, in which the parallel mechanism has been adapted. The principle of the mechanism has been discussed. By the means of the COSMOSworks, the main structure of the table has been building, the static state and modal characteristics have been analyzed, it makes the design easy to meet the requirements of the delivering functions.
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Key words
XY table,parallel mechanism,model building,modal analyzing,static analyzing
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