Experimental Study on Non-linear Calibration of Two-dimensional Nano-positioning Stage

This paper presents the control and non-linear calibration of large-scale two-dimensional nanometer displacement stage. The stage consists of a monolithic compliant mechanism, which using flexible hinge superimposed branch as a transmission part, driven by three piezoelectric actuators, To certify excellent performance of the stage, a micro-displacement measurement system which based on the measurement principle of a laser interferometer was setted up, then comparison of several stage parameters accomplished between before and after calibration. Based on the measurement of optical path and composition of dual-frequency laser interferometer, a experimental study on nano-positiong stage was carried out. The non-linear calibration method which based on newton-steffensen accelerated iteration are described; The accuracy of the calibration method was verified through experiments. Experiments show that: before calibration, the maximum nonlinearity error of x-axis and y-axis were 4.012 mu m and 2.875 mu m. after calibration, the maximum non-linearity of the x-axis is 8 nm and the maximum nonlinearity error of the y-axis is 10 nm, Meanwhile, a mathematical model is established to calculate the coupled displacement and yaw angle, The actual coupled displacement and yaw angle of X\Y were limited to 380nm and 1.4 mu rad.