Relative sensitivity factors for hard X-ray photoelectron spectroscopy with photon energies of 3.0, 5.9, 7.9, and 9.9 keV

Empirical relative sensitivity factors (RSFs) for the 1s, 2p(3/2), and 3d(5/2)levels relative to O1s were derived from the hard X-ray photoelectron spectroscopy measurements with photon energies of 3.00, 5.95, 7.94, and 9.92 keV. The data for 5.95, 7.94, and 9.92 keV were obtained at BL46XU in SPring-8, and those for 3.00 keV were obtained at BL6N1 in AichiSR (note that the measurement conditions, i.e., electron spectrometer and measurement geometry, at the two beamlines were different; for details, see Section >3). It was found that the empirical RSFs showed the linear behaviors as a function of the binding energy on a log-log plot. Also, from the comparison of the empirical RSFs and the theoretical RSFs calculated from Hartree-Slater cross sections reported by Scofield combined with the energy dependence on the spectrometer function and the inelastic mean free path, it is observed that there is an agreement between the empirical and the theoretical RSF values with several exceptions.