Structural, Optical and Ethanol Gas Sensing Performance of Aluminium Doped Zinc Oxide (AZO) Thin Films by Nebulizer Spray Technique

Aluminium doped zinc oxide (AZO) nano-structured films were deposited by nebulizer spray technique. The role of aluminium dopant concentration over the structural, optical and electrical properties was examined by different analytical techniques. The structural results from X-ray diffraction showed that preferential orientation of films obtained along the (002) direction. The surface morphology of the films showed a hexagonal facet with the nano-structured film. The parameters such as resistivity and activation energy were determined from electrical studies. The sensitivity of the films towards ethanol gas was investigated at room temperature.