Silicon-nitride/Oxynitride wavelength demultiplexer and resonators for quantum photonics

Soon Thor Lim,Alagappan Gandhi,Jun Rong Ong,Thomas Ang,Ching Eng Png,Ding Lu,Norman Soo Seng Ang,Ee Jin Teo,Jinghua Teng

Proceedings of SPIE（2018）

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摘要

SiOxNy shows promises for bright emitters of single photons. We successfully fabricated ultra-low-loss SiOxNy waveguide and AWG with low insertion loss <1dB and <3dB total loss (<2dB on-chip loss and <1dB coupling loss) at 1310nm.

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关键词

silicon-nitride/oxynitride wavelength demultiplexer,photonics,resonators,quantum

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