Co-doped SnO2 Sensor for Detection of Hydrogen Peroxide Vapors
SENSORS AND ELECTRONIC INSTRUMENTATION ADVANCES (SEIA'2018)（2018）
Abstract
Solid-state sensors made of doped metal oxide SnO2 were prepared for detection of hydrogen peroxide vapors. Gas sensitive nanostructured films were manufactured by the high-frequency magnetron sputtering method. The morphology of the deposited Co-doped SnO2 film was studied by scanning electron microscopy. The sensor sensitivity was measured at different operation temperatures of the sensor and different concentrations of hydrogen peroxide vapors. It was found that Co-doped SnO2 sensors exhibit a sufficient sensitivity to very low concentration of hydrogen peroxide vapors. The high performance was observed at the operating temperature of 150 degrees C. The sensor made of SnO2 had potential application in real samples for the implementation of medical diagnostic apparatus for use in determining low vapor concentration of hydrogen peroxide.
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Key words
Sensor,Hydrogen peroxide vapors,Semiconductor,Nanostructured film,Doped metal oxide
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