A Dual Axis CMOS Micromachined Convective Thermal AccelerometerAlexandra Garraud,Alain Giani,Philippe Combette,Benoit Charlot,Mathieu RichardSensors and Actuators A Physical（2011）引用 50|浏览0关键词Accelerometer,Thermal,Natural convection,CMOS,MEMSAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
