The simulative calculation and optimum design for FOA the purge gas sweeping system

Proceedings of SPIE(2016)

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摘要
This paper first studies the structure effect law in order to design a reasonable option in theory for the Final Optics Assembly(FOA)' harmonic converter module, involved in the design of the fluid theory, including the basic equations of fluid motion, the form of fluid motion and fluid movement in the small hole. Optimizing the structure need to be applied to the simulation software, which requires the Fluent simulation principle. Then, combined with theoretical knowledge to design the overall structure of the multiplier module, It will apply the simulation software to optimize structural parameters of the board and use control system to realize it for verifying the law obtained by simulation under various conditions whether consistent with the law in actual work of the sweeping system.
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关键词
FOA,sweeping system,Fluent,fluid field analysis
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