Raman spectra of DLC films prepared by bipolar-type plasma based ion implantation

Examination of Raman spectroscopy on the microstructure of diamond like carbon (DLC) films prepared by the bipolar-type plasma based ion implantation as a function of positively and negatively pulsed voltages (V-p and V-n) were carried out. Raman spectra were fitted by 4 peaks (D1: 1190 cm(-1), D2: 1380 cm(-1), G1: around 1530 - 1555 cm(-1) and G2: 1590 cm(-1)). The G1 peak shifted to higher wavenumbers and the intensity of G2 peak was increased with increasing V-p. In addition, the intensity ratio of D (D1 + D2) to G (G1 + G2) peaks was also increased. These results suggested that graphite structure was formed as V-p increased. With increasing V-n, on the other hand, the G1 peak did not shift so much and the intensity of G2 peak was decreased. This corresponds to the development of the turbostratic form (t-DLC).