Elastic-Plastic Deformation Behavior of Nanostructured HPPMS Hard Coatings

Nitride hard coatings deposited via HPPMS (High Power Pulsed Magnetron Sputtering) or HiPIMS (High Power Impulse Magnetron Sputtering) are widely used in tribological applications due to their promising wear and corrosion resistance. During the application, the coated tools or components may be exposed to significant mechanical loads. Therefore, investigations on deformation behavior of the coatings under mechanical loading are of great importance. The objective of the present study was a comprehensive investigation on deformation behavior of nitride hard coatings from the coating system M-Al-O-N (M = Cr, V) using nanoindentation und nanoscratch tests. In this regard, both nanoscale multilayer (nanolaminate) and monolayer coatings were investigated. All the coatings were deposited using HPPMS technology. Contrary to the expectations regarding a brittle behavior of ceramic-like coatings, the results depict a considerable plastic deformation of the investigated hard coatings. Furthermore, in addition to a high strength, the applied coatings show a high crack resistance under mechanical loading.