Advancements in the monolithically-integrated Microchemlab (TM)

A hand-held system for sensitive/selective detection of gas-phase chemicals has been developed and tested in the field. The sequential connection of microfabricated preconcentrators (PC), gas chromatography columns (GC) and a surface acoustic wave (SAW) detector arrays is used to impart selectivity and sensitivity to the MicroChemLab (TM) system. Hybrid integration of the micro components is used in the fielded system, permitting their individual optimization and modular replacement. To further reduce system dead volume and ease assembly requirements, monolithic integration of the PC and GC with a suitable silicon-based detector has been undertaken. A magnetically-actuated pivot plate resonator is presented as a candidate detector. Monolithic design, fabrication, coating and packaging are the topics of this correspondence.