III-V selective area growth and epitaxial functional oxides on Si: from Electronic to Photonic devices

C. Merckling,Z. Liu,M. Hsu,S. Hasan,S. Jiang,S. El-Kazzi,G. Boccardi,N. Waldron,Z. Wang,B. Tian,M. Pantouvaki,J. Van Campenhout,N. Collaert, M. Heyns,D. Van Thourhout,W. Vandervorst,A. Thean

ECS Transactions（2016）

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摘要

This review paper presents the challenges for the monolithic integration on silicon substrate by heteroepitaxy of III-V semiconductors selective area growth as well as epitaxial functional oxides. The heteroepitaxy of these materials on a common Si platform would allow the integration of new functionalities and advanced devices in both electronic and photonic areas.

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epitaxial functional oxides,photonic devices,si

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