Nanolayer Growth On 3-Dimensional Micro-Objects By Pulsed Laser Deposition

NANOMATERIALS(2021)

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摘要
Pulsed laser deposition on 3-dimensional micro-objects of complex morphology is demonstrated by the paradigmatic growth of cellulose and polymer/Y3Al5O12:Ce phosphor composite nanolayers. Congruent materials transfer is a result of multicomponent ablation performed by relatively low fluence (<200 mJ cm(-2)) ArF excimer laser pulses (lambda = 193 nm). Films grown on optical and engineering components, having a thickness from similar to 50 nm to more than similar to 300 nm, are durable, well adherent and maintain the structural and functional properties of the parent solids. The results verify the unique capabilities of deep-ultraviolet pulsed laser deposition of novel functional nanostructures on arbitrary surface morphologies and highlight its potential in future 3-dimensional nanotechnologies.
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关键词
3-dimensional coating, laser processing, pulsed laser deposition, nanocomposite, nanolayer, biopolymer, sensor, phosphor, light source
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