Si surface phases: Formation, role in processes and properties

VG Lifshits, YL Gavrilyuk,AV Zotov,DA Tsukanov

PHYSICS OF LOW-DIMENSIONAL STRUCTURES（1997）

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摘要

The formation of surface phases (SPs) and their role in the surface processes is examined. The influence of SPs on diffusion,desorption and interface formation is described. Surface reconstruction stability and some electrical properties of SPs have been studied.

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