X‐Ray Diffraction Microstrain Analysis for Extraction of Threading Dislocation Density of GaN Films Grown on Silicon, Sapphire, and SiC Substrates
physica status solidi (b)（2020）
关键词
gallium nitride,microstrain,stress gradients,threading dislocations,X-ray diffraction
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要