Study on Design and Fabrication of Micro Thermal Control Louvers

Cao Shengzhu,Chen Xuekang,Wu Gan,Yang Jianping,Wang Rui,Wang Lanxi,Shang Kaiwen

RARE METAL MATERIALS AND ENGINEERING（2011）

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Abstract

A micro thermal control device with polyimide based micro louver was proposed. The device structure was designed, the actuation voltage was analyzed theoretically and fabrication process was described. The micro louver prototype was fabricated using UV laser micromachining, electrochemistry etch and magnetron sputtering deposition technologies. The main parameters were tested and results were presented.

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Key words

micro louvers,micromachining,thermal control

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