FORMATION OF SURFACE LAYERS ON METALLIC MATERIALS WHEN APPLIED BY VACUUM-ION PLASMA TREATMENT

The influence of electron and ion streams of argon plasma on the structure and elements distribution in the surface layers of steels has been investigated by using glow discharge optical emission spectrometry and Auger electron spectrometry. It was shown that the sign and magnitude of the reference voltage on the treated surface determine the result of the influence of argon plasma on the structure and properties of the surface layer of structural metallic materials. The influence of the sequence of technological effects during the application of surface layers on the layer-by-layer composition and properties of the material being processed was investigated. It was shown that the interaction of the plasma flow with the material being processed leads to the development of processes of inverse diffusion of matrix elements to the surface, and the formation of micron and nanosized particles of oxides, carbides and carbonitrides in the surface layer, thus changing the properties of the products.