Measuring Silicon Pore Optics

Proceedings of SPIE(2017)

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摘要
While predictions based on the metrology (local slope errors and detailed geometrical details) play an essential role in controlling the development of the manufacturing processes, X-ray characterization remains the ultimate indication of the actual performance of Silicon Pore Optics (SPO). For this reason SPO stacks and mirror modules are routinely characterized at PTB's X-ray Pencil Beam Facility at BESSY II. Obtaining standard X-ray results quickly, right after the production of X-ray optics is essential to making sure that X-ray results can inform decisions taken in the lab. We describe the data analysis pipeline in operations at cosine, and how it allows us to go from stack production to full X-ray characterization in 24 hours.
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关键词
X-ray optics,X-ray astronomy,Silcon Pore Optics,X-ray telescopes,X-ray testing,ray tracing
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