Mechanical characterization of planar springs for compact radiation pressure power meters

Counter to conventional methods of measuring laser optical power, radiation pressure-based power meters operate by reflection rather than absorption. This provides an opportunity for in situ, non-destructive total beam power measurement. Compact radiation pressure power meters designed to operate between a few tens and a few thousands of watts consist of a planar millimeter-scale spring-electrode-mirror component that deflects under radiation pressure from an incident beam. Spring constant, resonant frequency, and quality factor of microfabricated springs as well as coating induced straining of the spring are the focus of this manuscript. We compare finite element models of the mechanical component with various measurements to inform future designs.