Visible to mid-infrared integrated sensors for air quality measurement
Proceedings of SPIE(2019)
Abstract
We present several integrated technologies on Silicon, from visible to mid-infrared, for particulate matter and gas detection. We present new concepts to detect in the visible particulate matter with a high sensitivity and a discrimination of both particle sizes and refractive indices. For gas detection, mid-infrared technologies developments include on one hand, microhotplate thermal emitters, as a cheap solution for gas sensing, eventually enhanced by plasmonics, and on the other hand quantum cascade lasers-based photoacoustic sensors, for high precision measurement, and for which the integration on Silicon is pushed forward for a reduction of costs.
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Key words
Particulate matter,CMOS image sensor,Mie scattering,Gas,infrared thermal emitter,plasmonics,quantum cascade lasers,photoacoustic
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