Cross-platform (NXE-NXT) machine-to-machine overlay matching supporting next node chip manufacturing

Theo Thijssen,Marcel Beckers, Albert Mollema,Leon Levasier, Alexander Padi, Chia-Wei Hung, Hsiao-Lan Chen, Laurens van Bokhoven, Niels Lammers, Jean Philippe van Damme, Floris Teeuwisse,Robin Tijssen,Wilson Tzeng,Cathy Wang,Marcel Mastenbroek, Harald Vos, Ting-Ju Yueh, Miao-Chi Chen, Hsueh-Hung Wu, Shin-Rung Peng,Chun-Kuang Chen, L. J. Chen,Kevin Cheng,John Lin

Proceedings of SPIE（2018）

Cited 3|Views2

Key words

Overlay matching,EUV scanner,immersion scanner,machine-overlay,on-product-overlay

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