Research of the Penetration Gas Methods of Measuring Barrier Property of OLED Packaging Materials by Mass Spectrometry

Measuring penetration rates of water vapor and oxygen though OLED packaging materials by mass spectrometry is a new method. Currently, the sampling of penetration gas is dynamic sampling method. The sensitivity of this method is magnitude of 10(-4) g/m(2)day, which can not reach the ideal magnitude of 10(-6) g/m(2)day. Static accumulation sampling method for improving sensitivity of measuring is present in this paper. Comparing with dynamic sampling method, the sensitivity of this sampling method has been improved 1-2 magnitudes. The devices of static accumulation sampling method have been designed. The experiments of measuring penetration rates of water vapor and oxygen through packaging materials have been done. The results and analysis of the experiments have been introduced.