Characterization of the microlithography and mercury drop methods to generate PDI's
Proceedings of SPIE(2018)
摘要
In this work, we compare two techniques to make point-diffraction interferometers (PDI): microlithography and the mercury drop method to know with which of these the best results can be obtained. For the comparison, we used the wavefront generated by a commercial reference surface of lambda/20 analyzing the interference pattern generated by the PDIs, we obtained information from the wavefront generated by the pinhole. Several PDIs were created and analyzed to have a statistical error information of both techniques.
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关键词
Point diffraction interferometer,mercury-drop method,microlithography
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