Determination of Diffusion Coefficient of Copper in ZnO (001) Single Crystals at 1000 degrees C

CRYSTALS(2019)

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Abstract
Copper from a solid source was diffused into undoped n-type bulk ZnO (001) single crystals at 1000 degrees C under a nitrogen atmosphere at different diffusion times. The Cu diffusion profiles were obtained by Secondary ion mass spectroscopy (SIMS), and the fitting reveals a diffusion case from a constant concentration source. A value for the diffusion coefficient of 2.42(+/- 0.2) x 10(-12) cm(2)center dot s(-1) was obtained. Electrical measurements present an increment of carrier concentration with diffusion time, but remains n-type which indicates an increase in the donor levels produced by structural defects in ZnO. Photoluminescence (PL) spectra showed an increment of green emission intensity associated with Cu incorporation.
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Key words
Zinc oxide,copper diffusion,SIMS,hall effect,PL
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