Inkjet-printed CMOS-integrated graphene–metal oxide sensors for breath analysis

NPJ 2D MATERIALS AND APPLICATIONS(2019)

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摘要
Early diagnosis in exhaled breath is a key technology for next-generation personal healthcare monitoring. Current chemiresistive sensors, primarily based on metal oxide (MOx) thin films, have limited applicability in such portable systems due to their high power consumption, long recovery time, poor device-to-device consistency, and baseline drifts. To address these challenges for ammonia ( NH_3 ) detection in exhaled breath, a critical biomarker for a variety of kidney and liver problems, we present a formulation of a graphene–MOx functional ink-based sensing platform. We integrate our sensing layer directly onto miniaturized CMOS microhotplates (μHP) via inkjet printing, potentially enabling scalability and device-to-device performance repeatability. Using stage-by-stage temporal analysis, and a temperature-pulsed modulation (TM) strategy, we achieve ultrahigh responsivity (1500
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关键词
Electronic properties and devices,Sensors,Materials Science,general,Nanotechnology,Surfaces and Interfaces,Thin Films
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