X-Ray Diffractometry of Lanthanum-Doped Iron-Yttrium Garnet Structures after Ion Implantation

Structural changes of the surface layers of Y2.95La0.05Fe5O12 epitaxial films are studied by methods of high-resolution X-ray diffraction before and after the influence of high-dose implantation of nitrogen ions. The simulation of the reciprocal space maps is performed, using statistical kinematic theory of diffraction. The quantitative characteristics of the defect structure of films are obtained. As shown, the significant sputtering and amorphization of the surface layer during high-dose nitrogen-ions' implantation activate diffusion processes, which lead to significant changes of magnetic properties of films and substantial reduction of the width of ferromagnetic resonance line.