Effect of PZN Addition on Microstructure of PZT Thick Films by Aerosol Deposition Process
JOURNAL OF THE KOREAN CRYSTAL GROWTH AND CRYSTAL TECHNOLOGY(2018)
Abstract
Lead zinc niobate (PZN) added lead zirconate titanate (PZT) thick films with thickness of 5 similar to 10 mu m were fabricated on silicon and sapphire substrates using aerosol deposition method. The contents of PZN were varied from 0 %, 20 % and 40 %. The initial particles (PZT, 2PZN-8PZT, 4PZN-6PZT) had irregular shape and submicron sizes. The as-deposited film had fairly dense microstructure without any crack, and showed only a perovskite single phase formed with nano-sized grains. The as-deposited films on silicon were annealed at the temperatures of 700 degrees C, and the films deposited on sapphire were annealed at 900 degrees C in the electrical furnace. The effects of PZN addition on the microstructural evolution were observed using by FE-SEM and HR-TEM.
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Key words
PZN,PZT,Aerosol-deposition process,FE-SEM,HR-TEM
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