Effect of PZN Addition on Microstructure of PZT Thick Films by Aerosol Deposition Process

Lead zinc niobate (PZN) added lead zirconate titanate (PZT) thick films with thickness of 5 similar to 10 mu m were fabricated on silicon and sapphire substrates using aerosol deposition method. The contents of PZN were varied from 0 %, 20 % and 40 %. The initial particles (PZT, 2PZN-8PZT, 4PZN-6PZT) had irregular shape and submicron sizes. The as-deposited film had fairly dense microstructure without any crack, and showed only a perovskite single phase formed with nano-sized grains. The as-deposited films on silicon were annealed at the temperatures of 700 degrees C, and the films deposited on sapphire were annealed at 900 degrees C in the electrical furnace. The effects of PZN addition on the microstructural evolution were observed using by FE-SEM and HR-TEM.