Research on Convergence Efficiency Optimization of Large and Middle-Scale Silicon Carbide Mirrors

With the increase of the diameter of the silicon carbide (SiC) mirror, the amount of material removed increases dramatically. The SiC material has the characteristics of high hardness and chemical stability, so the higher requirement of the convergence efficiency is put forward. The current SiC mirror processing is carried out through a series of different processes or parameters. The combined processing converge the surface residual error. But this method relies on the experience of personnel experience to determine the transfer conditions of process sequencing. This paper research on improve the convergence efficiency at the same time ensuring the accuracy of processing. The quantified evaluation function is put forward to help estimating the transfer conditions of process sequencing. On this basis, the multi-process combination calculation is carried out. The dwell time of multiple remove functions is solved at the same time in the optimization process. The combination of large and small removal function is optimized. Combined with the simulation calculation, the optimized process of large diameter silicon carbide mirror is given.