Preparation of (Pb0.52Zr0.48)TiO3 Thin Films On PbTiO3 Seed Layer

(Pb0.52Zr0.48)TiO3 (PZT) thin films were prepared on PbTiO3 (PT) seed layers by chemical solution deposition. PT layer with 50 nm was used as seed layer to transfer 100 texture to PZT thin films by heterogeneous nucleation during heat treatment. Highly 100 textured PZT thin films were obtained after heat treatments at 700 degrees C confirmed by X-ray diffraction data. The prepared PZT thin films show the thickness of 350 nm with 50 nm PT seed layer. Based on the EDX line profile of PZT, Zr/Ti ratio was slightly different inside PZT films, which suggests that interdiffusion of Ti and Zr occurs across the films during heat treatments. Also, nanobeam diffraction patterns reveals that PZT and PT seed layer are tetragonal perovskite phases without any secondary phases.