Development of a Carbon Cluster Ion Source with a Hollow Cathode

Carbon cluster ion beams were produced utilizing a monoplasmatoron ion source with carbon cold hollow cathodes. Changing the gas injection position of the hollow cathode caused the difference in intensities and species of extracted ions. The pure carbon cluster ion beams were successfully produced at about 36 Pa Ar gas pressure in the ion source, 70 mA discharge current, 1 kV extraction voltage and focusing by an electrostatic lens system. The source operation was often limited by discharge extinction, possibly attributable to a rapid discharge pumping.