Synthesis and properties of hydrogenated aluminum thin film by reactive sputtering

A.P. Baraban,M.A. Dobrotvorskii,D.I. Elets,I.E. Gabis,V.G. Kuznetsov,V.A. Piven,A.P. Voyt, A.A. Selivanov

Thin Solid Films（2020）

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摘要

•Sputtering synthesis of aluminum film with aluminum hydride inclusion.•Total amount of evolved hydrogen points to the AlH1.1 initial composition.•Luminescent properties of the synthesized film are similar to aluminum hydride.•Newly synthesized film have dielectric properties even after heating to 200 °C.

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关键词

Hydrogen storage,Thin films,Reactive sputtering,Alane

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