Activation Characterization of the Ti-Zr-V Getter Films Deposited by Magnetron Sputtering

Resolved XPS spectra of (a) Ti 2p, (b) Zr 3d, (c) V2p + O1s and (d) C 1s orbitals indicates that the activation takes place at 150 °C as the initially formed vanadium oxides have already been reduced to metallic V0. The TiO2 and ZrO2 are also reduced to their lower valence states. This figure also verified the step by step reduction path of the oxides of higher valence states to final metallic states during annealing treatment. The line represented by the discrete circles shows the raw data, while the red line is the synthetic envelop. The dashed lines represents the individual components resolved out of the collected spectra.