Stiffness Matrix of MEMS on the Stress-Strain Method Basis

Igor Nevliudov,Nataliia Demska,Victor Palagin, Victoria Nevlyudova,Iryna Botsman,Kostyantyn Kolesnyk

2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH)（2020）

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摘要

In the paper a method is described that is used for constructing the MEMS stiffness matrix on basis of the stress-strain method taking into account the type of deformation that corresponds to the calculated stiffness component and the classification of forces contributing to each type of deformation.

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关键词

MEMS,stress-strain state,stiffness,matrix structure analysis

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