Verification and Induction Method for Low Frequency Response Failure Modes in Acoustic MEMS

In this paper we present a novel verification and induction method for low frequency response failure modes in MEMS microphones. Response from the device is captured before and after the occurrence of a defect present on the diaphragm of the microphone and induced by focus ion beam machining. The deviation in the frequency response of the microphone shows a good agreement with analytical results.