A Portable Quantitative Phase Microscope for Material Metrology and Biological Imaging

PHOTONICS RESEARCH(2020)

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Abstract
Quantitative phase microscopy (QPM) has emerged as an important tool for material metrology and biological imaging. For broader adoption in those applications, we have proposed and demonstrated a new portable off-axis QPM method, which works in both transmission and reflection modes to meet different sample measurement requirements. The temporal and spatial sensitivities of our system, as quantified by optical path-length difference values, are 0.65 nm and 1.04 nm, respectively. To demonstrate its applicability for a wide range of applications, we deployed our system for profiling transistor gold electrode samples, observing red blood cell membrane fluctuations, imaging living cells flowing in a microfluidic chip, etc. Our portable QPM system has a low-cost design and involves a simple and robust phase-retrieval algorithm that we envision will allow for broader deployment at different environmental settings, including in resource-limited sites and integration with other metrology or imaging modalities. (c) 2020 Chinese Laser Press
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Key words
Quantitative Phase Imaging,Surface Profilometry,Phase Contrast Imaging,Optical Metrology,3D Shape Measurement
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