Synthesis and structural properties of Mo-S-N sputtered coatings

Kaushik Hebbar Kannur,Talha Bin Yaqub,Teodor Huminiuc,Tomas Polcar,Christophe Pupier,Christophe Héau,Albano Cavaleiro

Applied Surface Science（2020）

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摘要

•Solid lubricant Mo-S-N coatings were prepared with different nitrogen contents.•Improved adhesion obtained using a novel gradient layer and deposition procedure.•Coating with 28 at. % N, cohesive failure limit reached 38 N due to amorphousness.•Coatings were dense, compact and amorphous for high N content.•Coating showed S/Mo ratio of 1.25 for highest N content (37 at.%) by retaining S.

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关键词

Transition metal dichalcogenides,Solid lubricant coatings,DC magnetron sputtering,Mo-S-N coatings,Nitrogen-doped TMD coatings

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