Investigation on preparation of vanadium nitride hard coating by in-situ method technique

Materials Letters（2020）

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摘要

•Vanadium nitride coating is generated by in-situ reaction and CVD.•VN phase undergoes a grain boundary wet phase transition.•Orthogonal test to analyze the influence on the thickness of the coating.

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关键词

Chemical vapor deposition,Coatings,Surfaces,Orthogonal test,Deposition rate

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