Accelerated wetting transition from hydrophilic to hydrophobic of sputtered Cu films with micro-scale patterns

Applied Surface Science(2020)

Cited 12|Views14
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Abstract
•Metallic Cu films were prepared by DC magnetron sputtering.•Micro-square holes were fabricated using lithography technique.•Wetting transition from hydrophilic to hydrophobic was accelerated with patterns.•Stable wetting on patterned Cu films was in Cassie-Baxter state.
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Key words
Cu films,Micro-scale patterns,Wetting,Hydrocarbon adsorption,Cassie-Baxter,Magnetron sputtering
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