Pulsed-flow growth of polar, semipolar and nonpolar AlGaN

Duc V. Dinh,Nan Hu,Yoshio Honda,Hiroshi Amano,Markus Pristovsek

JOURNAL OF MATERIALS CHEMISTRY C（2020）

引用 11|浏览26

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摘要

The impacts of pulsed-flow growth on aluminium incorporation in polar (0001), semipolar (101 & x304;3) and (112 & x304;2), as well as nonpolar (101 & x304;0) AlGaN layers have been investigated. The layers were grown simultaneously on differently oriented AlN/sapphire templates by metal-organic vapour phase epitaxy. The AlN mole fraction (0 更多

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