Electrical resistivity reduction and spatial homogenization of Ga-doped ZnO film by Zn layer insertion

Yasuji Yamada,Orkut Sancakoglu, Rei Sugiura, Motonari Shoriki,Shuhei Funaki

Thin Solid Films（2020）

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摘要

•Electrical resistivity reduction by inserting Zn layers in Ga-doped films.•Films with high transparency and low resistivity were obtained.•Resistivity degradation at erosion position in sputtering process disappeared.•Contribution of Zn atoms to the enhancement of carrier density.

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关键词

Transparent conducting oxide,Sputtering,Annealing,Acceptor-like defect,Carrier density

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