Optical, structural and electrical characterization of pure ZnO films grown on p-type Si substrates by radiofrequency magnetron sputtering in different atmospheres

ZnO films were grown on p-type Si substrates by radio-frequency magnetron sputtering of ZnO target in pure argon or mixed argon-oxygen plasma and were investigated using atomic force microscopy, spectroscopic ellipsometry, Fourier-transformed infrared spectroscopy and electrical methods. It was observed that the films grown in argon plasma had large surface roughness which increases with the rise of deposition time. The lateral size of ZnO columns showed similar dependence on deposition parameters as the roughness. Contrary to this, the films produced in argon-oxygen plasma were found to be smoother and denser having thinner ZnO columns. These films also demonstrated an abrupt absorption band-gap edge that is the evidence of better crystalline quality of these films (the lower number of native point and elongated defects). Plasmon-phonon interaction in ZnO films as well as the effect of the plasmon system of Si substrate on this interaction was considered. The theoretical approach used for the fitting of specular infrared reflection spectra allowed determining concentration and mobility of free carriers as well as conductivity of ZnO films. It was found that the films grown in pure argon plasma demonstrated a higher concentration and a smaller mobility of free carriers in the comparison with the corresponding parameters of the films grown in argon-oxygen mixed plasma. The direct resistivity measurements show the essentially higher values compared with the values estimated from IR reflection spectra. The possible reasons of this difference are discussed. The utility of infrared reflection spectroscopy for the non-destructive analysis of electro-physical properties of polycrystalline films was shown.