Arrays of vertically aligned multi-walled carbon nanotubes grown on silicon and copper substrates by thermal decomposition of ferrocene-toluene aerosol

Arrays of multi-walled carbon nanotubes (MWCNTs) were grown vertically on the surfaces of SiO2/Si substrates using aerosol-assisted catalytic chemical vapour deposition (CCVD) method. Aerosol was produced by injecting a solution of ferrocene (catalyst source) in toluene (carbon source) into a hot zone of a horizontal CVD reactor. Dependences of the height and density of the MWCNT array on the synthesis temperature and ferrocene concentration were determined. The found optimal parameters were used for the MWCNT growth on copper substrates. For this purpose, a copper foil was covered by alumina layer and we showed that the thickness of this layer should be not less than 17 nm to provide the MWCNT growth over the entire foil surface. The vertically aligned MWCNT array tightly bonded with copper substrate can be used as a heat-exchange surface in various micro and nano heat-transfer devices.